Mass flow techniques provide more RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements compared to volumetric methods such as rotometers and turbine meters. Mass flow measurements use the density of the gas to translate mass flow units (kg or lbs) to units of familiar volumetric terms(liters/min). However the measurements are still mass units and we call those units STANDARD liter/min (SLM) and they do not change with temperature and pressure changes. We do this by referencing just one, specific temperature and one specific pressure (STP). For a more detailed explanation, see Mass Flow vs. Volumetric Flow.
200 Series instruments have flow ranges from 0-10 sccm to 0-500 slm (Large flows to 15,000 slm with a Laminar flow element); use elastomeric seals, provide analog outputs, and are constructed of stainless steel. The controllers have normally closed valves. Corrosive gases, with the exception of the halogens, pressures up to 1000 psig (optional) are easily measured.
Specification |
Mass Flow Meter & Controller
HFM 200
HFC 202 |
Mass Flow Meter & Controller
HFM 201
HFC 203 |
Mass Flow Meter & Controller
HFM 200
with LFE |
| View Product Bulletins for ordering codes |
Find Ordering Codes On Last Page |
Find Ordering Codes On Last Page |
Find Ordering Codes On Last Page |
| Manuals |
HFM 200 / HFC 202 |
HFM 201 / HFC 203 |
HFM 200 / HFC 202 |
| Drawings |
HFM 200 / HFC 202 |
HFM 201 / HFC 203 |
HFM 200 / HFC 202 |
| Full Scale Flow Range |
0-10 sccm to
0-25,000 sccm |
0-25 slm to
0-500 slm |
0-25 slm to
0-15,000 slm |
| Accuracy |
+/-1% of Full Scale Improvement with optional Polynomial fit |
+/-1% of Full Scale Improvement with optional Polynomial fit |
+/-1% of Full Scale Improvement with optional Polynomial fit |
| Repeatability |
+/-0.05% of Full Scale |
+/-0.05% of Full Scale |
+/-0.05% of Full Scale |
| Standard Pressure Rating |
500 psig |
500 psig |
500 psig
150 psig - flanged |
| Pressure Coefficient |
-0.0067%/psi(0-1000 psig N2) typical
|
-0.0067%/psi(0-1000 psig N2) typical |
-0.0067%/psi(0-1000 psig N2) typical |
| High-Pressure Option |
1000 psig (proof tested to 1500 psig) |
1000 psig (proof tested to 1500 psig) |
Dependent on fitting type |
| Temperature Coefficient (0-60o C) |
Zero +/-0.035% FS/o C Span
+/-0.05% Rdg/o C |
Zero +/-0.035% FS/o C Span
+/-0.05% Rdg/o C |
Zero +/-0.035% FS/o C Span
+/-0.05% Rdg/o C |
| O-Ring Seals |
Viton® (Std)
Kalrez®
Neoprene
Buna-N |
Viton® (Std)
Kalrez®
Neoprene
Buna-N |
Viton® (Std)
Kalrez®
Neoprene
Buna-N |
| Leak Integrity |
< 1 x 10-9 sccs He |
1 x 10-9 sccs He |
1 x 10-9 sccs He |
| Power - Meter |
+/-15VDC at +/-25 mA |
+/-15VDC at +/-25 mA |
+/-15VDC at +/-25 mA |
| Power - Controller |
+/-15 VDC at +60 mA/ -185 mA |
+/-15 VDC at +60 mA/ -185 mA |
N/A |
| Flow Signal |
0-5.00 VDC
(
4-20 mA option) inherently linear |
0-5.00 VDC
( 4-20 mA option) inherently linear |
0-5.00 VDC
( 4-20 mA option) inherently linear |
| Wetted Material - Meter |
316 SS, Viton® ,
82/18 Au/Ni braze, trace silver solder |
316 SS, Viton® ,
82/18 Au/Ni braze, trace silver solder |
316 SS, Viton® ,
82/18 Au/Ni braze, trace silver solder |
| Wetted Material - Controller |
316 SS, Viton® ,
82/18 Au/Ni braze, trace silver solder Kalrez®
Ni
|
316 SS, Viton® ,
82/18 Au/Ni braze, trace silver solder, Kalrez®
Ni |
N/A |
| Connector |
15-pin subminiature D |
15-pin subminiature D |
15-pin subminiature D |
| Pin out diagrams |
H - Pin out |
H - Pin out |
H - Pin out |
| Fittings |
1/4" Swagelok® (STD) Options
1/8" Swagelok®
1/4" VCR® pair
1/4" VCO® pair
6mm Swagelok® pair
No Fittings
|
1/2" Swagelok® (STD) Options
1/2" VCR® pair
1/2" VCO® pair
12mm Swagelok® pair
No Fittings |
Various diameters of NPT
Flanged
Smooth tube |
| Weight (approx) |
HFM 200 - 1.8 lbs
HFC 202 - 1.8 lbs |
HFM 201 - 3.3 lbs
HFC 203 - 5.6 lbs |
HFM 200 - 1.8 lbs
LFE - Varies |
Note: *See manuals for Gas Conversion Factors and detailed explanation of accuracy
