Mass flow techniques provide more RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements compared to volumetric methods such as rotometers and turbine meters. Mass flow measurements use the density of the gas to translate mass flow units (kg or lbs) to units of familiar volumetric terms (liters/min). However the measurements are still mass units (we call those units STANDARD liter/min (slm)) and they do not change with temperature and pressure changes. We do this by referencing just one, specific temperature and one specific pressure (STP).

300 Series mass flow instruments have flow ranges from 0-5 sccm to 0-3,000 slm; use all metal seals, provide analog outputs, and are constructed of stainless steel. The mass flow controllers have normally closed valves. Corrosive gases, with the exception of the halogens, pressures up to 1000 psig (optional) are easily measured.

Features • +/-0.75% of Full-Scale Accuracy for HFM 300/HFC 302 with 0-10,000 sccm • +/-1% of Full-Scale Accuracy for 10,000 sccm - 2,500 slm • +/- 2% Full Scale accuracy for 2,500 - 3,000 slm • Proven Reliability • Range 5 sccm to 3,000 slm(N2 Equivalent) • NIST Traceable Calibration Accessories For Mass Flow Meters And Mass Flow Controllers PowerPod Models 40, 100, & 400 Cables Flow Service Plan Oxygen Cleaning

Applications • Leak Testing • Vapor Deposition • Pharmaceutical Processes • R&D And Process Flows • Semiconductor Processes • Gas Blending • Thermal Flame Spray

Go To Volume (Flow Rate) Conversions

300 Series Mass Flow Meter and Controller Specifications (Based on Nitrogen)
Standard Temperature and Pressure - 0° C and 760 Torr

Specification	Mass Flow Meter & Controller HFM 300 HFC 302	Mass Flow Meter & Controller HFM 301 HFC 303	Mass Flow Meter & Controller HFM 305 HFC 307
View Product Bulletins for ordering codes	Find Ordering Codes On Last Page	Find Ordering Codes On Last Page	Find Ordering Codes On Last Page
Manuals	HFM 300 / HFC 302	HFM 301 / HFC 303	HFM 305 / HFC 307
Drawings	HFM 300 / HFC 302	HFM 301 / HFC 303	HFM 305 / HFC 307
Full Scale Flow Range	0-5 sccm to 0-25,000 sccm	0-25 slm to 0-1000 slm	0-1000 slm to 0-3,000 slm
Accuracy	+/-0.75% of Full Scale 0-10,000 sccm +/-1% of Full Scale 10,000 - 25,000 sccm, Improvement with optional Polynomial fit	+/-1% of Full Scale Improvement with optional Polynomial fit	+/-1% of Full Scale for 0 - 2,500 slm, +/-2% of full scale for 2,500 - 3,000 slm
Repeatability	+/-0.07% of Full Scale	+/-0.07% of Full Scale	+/-0.07% of Full Scale
Standard Pressure Rating	500 psig	500 psig	500 psig
Pressure Coefficient	+0.01%/psi of reading (0-50 psig N2) typical	+0.0267% of reading/psi (0-1000 psig N2) typical	+0.015%/psi(0-500 psig N2)
High-Pressure Option	1000 psig (proof tested to 1500 psig)	1000 psig	Not Available
Temperature Coefficient (0-60o C)	Zero <-0.10% FS/o C Span <0.03% Rdg/o C	Zero <0.10% FS/o C Span <0.05% Rdg/o C	Zero <-0.079% FS/o C Span <0.092% Rdg/o C (15-50 o C
Leak Integrity	< 1 x 10-9 sccs He	1 x 10-9 sccs He	1 x 10-9 sccs He
Power - Meter	+/-15VDC at 55 mA	+/-15VDC at 55 mA	+/-15VDC at 55 mA
Power - Controller	+/-15 VDC at 150 mA	+/-15 VDC at 150 mA	+/-15 VDC at 150 mA
Flow Signal	0-5.00 VDC ( 4-20 mA option) inherently linear	0-5.00 VDC ( 4-20 mA option) inherently linear	0-5.00 VDC ( 4-20 mA option) inherently linear
Attitude Sensitvity of Zero	< 0.7% of Full Scale (N2@19.7 psia)	< 0.25% of Full Scale
Attitude Sensitvity of Span	< 0.05% of Full Scale (N2@19.7 psia)	< 0.06% of reading
Settling Time of Meter	</=0.3 sec (0% to 100% FS) for 0-10,000 sccm </= 0.5 sec (0% to 100% FS) for 0-25,000 sccm	</=0.4 sec (0% to 100% FS)	</=0.4 sec (0% to 100% FS)
Settling Time of Controller	</= 0.75 sec (0% to 100% FS)	</= 2.0 sec (0% to 100% FS)	</= 2.0 sec (0% to 100% FS)
Wetted Material - Meter	302 SS, 316 LSS, Ni 200	Viton® , 302 SS, 316 LSS, Ni 200	302 SS, 316 LSS, NI 200
Wetted Material - Controller	302 SS, 316 LSS, Ni 200, Kalrez ® , (Valve Seat)	Viton® , 302 SS, 316 LSS, Ni 200, Teflon ® ,(Valve Seat) Kalrez®	302 SS, 316 LSS, Ni 200, Kalrez ® (Valve Seat)
Connector	15-pin subminiature D	15-pin subminiature D	15-pin subminiature D
Pin out diagrams	H - Pin out	H - Pin out	H - Pin out
Fittings	1/4" Swagelok® (STD) Options 1/8" Swagelok® 1/4" VCR® pair 1/4" VCO® pair 6mm Swagelok® pair No Fittings	1/2" Swagelok® (STD) Options 1/2" VCR® pair 1/2" VCO® pair 12mm Swagelok® pair No Fittings	1" Swagelok® (STD) Options 1" VCR® pair 1" VCO® pair 25mm Swagelok® pair No Fittings
Weight (approx)	HFM 300 - 1.95 lbs HFC 302 - 2.45 lbs	HFM 301 - 3.5 lbs HFC 303 - 5.3 lbs	HFM 305 - 8.2 lbs HFC 307 - 15.3 lbs

*Accuracy is for Nitrogen. See manuals for Gas Conversion Factors