Mass flow techniques provide more RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements compared to volumetric methods such as rotometers and turbine meters. Mass flow measurements use the density of the gas to translate mass flow units (kg or lbs) to units of familiar volumetric terms (liters/min). However the measurements are still mass units (we call those units STANDARD liter/min (slm)) and they do not change with temperature and pressure changes. We do this by referencing just one, specific temperature and one specific pressure (STP).

300-D-Series mass flow instruments have flow ranges from 0-5 sccm to 0-3,000 slm; use all metal seals, provide analog outputs, and are constructed of stainless steel. The mass flow controllers have normally closed valves. Corrosive gases, with the exception of the halogens, pressures up to 1000 psig (optional) are easily measured.

Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. When monitoring different gases in the same level of magnitude, (flow rate, molecular weight) this instrument is economically superior and more efficient when changing gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.

± (0.5% of reading + 0.2% of full scale) Accuracy for 3,000 slm

Go To Volume (Flow Rate) Conversions

Features
• +/- (0.5% of reading + 0.2% of Full Scale)
for 0 - 2,500 slm
• Proven Reliability
• Range 5 sccm to 3,000 slm(N₂ Equivalent)
• NIST Traceable Calibration
• Built in Totalizer
• Automatic Zeroing

Accessories For Meters And Controllers
Power^Pod Models 40, 100, & 400
Cables
Flow Service Plan

300-D-Series Mass Flow Meter and Controller Specification (Based on Nitrogen)
Standard Temperature and Pressure - 0° C and 760 Torr
*Compliance Data Forthcoming