Vacuum Measurement & Control
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 Downloads

P​roduct Bulletins

Product Manuals

Software/Firmware

Posts
  • HVG-2020B Blog (Coming Soon!)

Video
  • Introduction to the HVG-2020B (Coming Soon!)

 


 

 

 


 


 

 Related Products

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​​​Part Number​Description
​12-01-169
​24 VDC Switching Power Supply for THCD-100

​12-01-160
​AC Input Clip, US

​12-01-165
​AC Input Clip, UK

​12-01-164
​AC Input Clip, Europe / China


CB-LDS-XXX-HV9​

HVG-2020 Cable (9-pin) to bare leads


CB-RS232-TRRS
​Serial Communication Cable


​CB-USB-Micro-B
​USB Cable




 Overview

 

Optional Touch Screen Display, Wide Range, Flexible Vacuum Control!

The HVG-2020B wide range, dual sensor vacuum gauge takes measurement to the next level.  With a Piezo based sensor and a thermal based Pirani sensor accurately and confidently measure pressures across seven decades. The Piezo sensor is media isolated, gas composition independent,  and periodically zeroed by the Pirani sensor.  An ambient thermal sensor enables the instrument to adjust for temperature and therefore better accuracy.

The optional touchscreen display, free windows data acquisition software and a variety of digital communication paths makes the HVG-2020B flexible and user friendly.  Whether you need USB, RS 232, RS 485, linear or log outputs, graphical displays or data acquisition logging, this wide range gauge can perform.

Applications and Industries

 

  • Semiconductor Etch
  • Sputtering Chamber
  • Load Lock Systems
  • Process Control and Test
  • Plasma Coating

 

 

 Specifications


Range​:
​​​​0.1 mTorr to -100​0 Torr
Accuracy*: 10 Torr - 1000 Torr
1 mTorr - 10 Torr
0.2 mTorr - 1 mTorr
+(0.1% of Reading +0.3 Torr)
+(5% of Reading +0.25 mTorr)
+(10% of Reading +0.25 mTorr)
Operating Temperature:​ -20-70oC
​Analog Output (Voltage):
​0-1 VDC, 0-5 VDC, 0-10 VDC Linear & Log

​Analog Output (Current):
​0-20 mA, 4-20 mA
Input Voltage: ​12-36 VDC
Wetted Materials: ​304 and 316L Stainless Steel, Glass, Ni, Au
​Process Control Setpoints
​Dual TTL (High & Low)
*​​Includes non-linearity, hysteresis, repeatability at ambient operating temperature after 2 hours warm up followed by zero adjustment.



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