The award winning 2002 Series wide range, dual sensor vacuum gauge, is available in two mounting styles, panel mount or sensor mount.
The HPM-2002, dual sensor vacuum gauge, is a panel mount instrument with a micro-processor based display unit, gauge tube, and interconnecting cable. The two sensing elements (micro-machined Pirani and Piezoresistive sensor), provide accurate vacuum measurement over 7 decades of pressure from 1 X 10-4 to 1000 Torr. An algorithm residing in the microprocessor ensures a seamless transition between the sensors. The HPM-2002-OBE, dual sensor vacuum gauge, is a system mounted version of the gauge. The HPM-2002-OBE provides all of the performance features of the 2002 Series in a compact configuration with your choice of 12 signal output options.
Applications
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Semiconductor Etch
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Sputtering Chamber
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Load Lock Systems
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Process Control and Test
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Plasma Coating
