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 Overview

All Metal, Fast Response, Tight Accuracy!

Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.

HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.

Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.

± (0.5% of reading + 0.2% of full scale) Accuracy

Buy from the designers, Teledyne Hastings, and experience extraordinary customer service. Let us solve your application challenges, by designing and building your flow instruments.

Applications and Industries

  • Leak Testing
  • Thin Film Deposition
  • High Purity Gas Delivery
  • Thermal Flame Spray
  • Gas Blending
  • Pharmaceutical Process

 Specifications

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HFM-D-300A Meter HFC-D-302A Controller
​Range 0 - 5 sccm to 0 - 25 slm (N2)0 - 5 sccm to 0 - 25 slm (N2)
Accuracy + (0.5% of reading + 0.2% of full scale)+ (0.5% of reading + 0.2% of full scale)
​Repeatability + 0.15% of F.S.+ 0.15% of F.S.
Maximum Working Pressure 500 PSIG (Optional 1000 PSIG) ​500 PSIG (Optional 1000 PSIG)
Settling Time Typically <1 secondsTypically <1 - 2 seconds
Analog I/O (Standard) ​0 - 5 VDC ​0 - 5 VDC
Analog I/O (Optional) ​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA
​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA
Digital I/O (Standard) ​RS-232, RS-485 RS-232, RS-485
Analog Connector 15-pin subminiature D
15-pin subminiature D
​Digital Connector Dual RJ-12 Dual RJ-12
Power Requirements ​​11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)​​11 - 36 VDC @ 6.7 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)
Wetted Materials ​316L SS, Nickel 200, 304 SS, 302 SS​316L SS, Nickel 200, 302 SS, 304 SS, Kalrez® (Valve Seat)

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