Vacuum Measurement & Control
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Request evaluation sample for HPM 2002

 Specifications

Specification
Bencht​​op / Panel Mount
HPM ​2002
Sensor Mount
HPM-2002 OBE
​Vacuum Range
​0.0001 - 1000 Torr
(0.1 m​Torr - 1000 Torr)
​0.0001 - 1000 Torr
(0.1 mTorr - 1000 Torr)
​​Accuracy
​+/- 1.5% of Reading 50 - 1000
+/- 20% of Reading 0.001 - 50 Torr
+/- 1.5% of Reading 50 - 1000 Torr
+/- 20% of Reading 0.001 - 50 Torr
​Sensor Type: Direct Force (Gas Composition Independent) ​Piezoresistive: 32 - 1000 Torr ​Piezoresistive: 32 - 1000 Torr
​S​ensor Type: Thermal Conductivity (Gas Composition Dependent) ​ ​Micromachined Pirani: 0.0001 - 8 Torr ​Micromachined Pirani: 0.0001 - 8 Torr
​Microprocessor calculated weighted average between 8 and 32 Torr ​​​Microprocessor calculated weighted average between 8 and 32 Torr
Sensor Part Numbers​
​(Sold Separately)
1/8" NPT (STD)
1/4" VCR
1.33 Conflat Flange
2.75 Conflat Flange
KF-16
KF-25
1/2" OD Smooth Tube
1/2" VCR
​(Included)
1/8" NPT (STD)
1/4" VCR
1.33 Conflat Flange
2.75 Conflat Flange
KF-16
KF-25
1/2" OD Smooth Tube
1/2" VCR
​Display ​3 Digit LED floating point mantissa plus 2 digit exponent ​4 Digit LED floating point
​Units
​Front Panel Selectable
Torr
mbar
Pa
​Specify when ordering
​Panel Cutout
​1/4" DIN
W - 3.75"
H - 3.75"
​Standard Output
​Single Channel
Linear per decade (1.0 - 4.5 VDC)
​Dual Channel
Linear (0 - 10 VDC)

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 Related Products

Part Number Description ​​Image
​​HPM-2002 Diag​​ Diagnostic Tube
​CB 2002 D01 ​Cable, 2 Meters, HPM-2002
​CB 2002 D02 ​Cable, 5 Meters, HPM-2002
​HPM-2002-OBE-PS​HPM-2002 OBE Power Supply (100 - 240 VAC to 15 VDC)
​HPM-2002-OBE Ruggedized​HPM-2002 Ruggedized mount of sensor to electronics
​CB-RS232-RJ12​HPM-2002 OBE Cable RS232, 9-Pin D RJ12
​65-724​Molecular Sieve Filter
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 Overview

​The award winning 2002 Series wide range, dual sensor vacuum gauge, is available in two mounting styles, panel mount  or sensor mount. 

The HPM-2002, dual sensor vacuum gauge, is a panel mount instrument with a micro-processor based display unit, gauge tube, and interconnecting cable.  The two sensing elements (micro-machined Pirani and Piezoresistive sensor), provide accurate vacuum measurement over 7 decades of pressure from 1 X 10-4 to 1000 Torr.  An algorithm residing in the microprocessor ensures a seamless transition between the sensors.  ​The HPM-2002-OBE, dual sensor vacuum gauge, is a system mounted version of the gauge.  The HPM-2002-OBE provides all of the performance features of the 2002 Series in a compact configuration with your choice of 12 signal output options. ​

​​Applications
  • Semiconductor Etch
  • Sputtering Chamber
  • Load Lock Systems
  • Process Control and Test
  • Plasma Coating


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