The award winning 2002 Series wide range, dual sensor
vacuum gauge, is available in two mounting styles, panel mount or sensor mount.
The HPM-2002, dual sensor vacuum gauge, is a panel mount instrument with a micro-processor based display unit,
gauge tube, and interconnecting cable. The two sensing elements (micro-machined Pirani and Piezoresistive sensor), provide accurate vacuum measurement over 7 decades of
pressure from 1 X 10-4 to 1000 Torr. An
algorithm residing in the microprocessor ensures a seamless transition between
the sensors. The HPM-2002-OBE, dual sensor vacuum
gauge, is a system mounted version of the gauge. The HPM-2002-OBE provides
all of the
performance features of the 2002 Series in a compact configuration with your choice of 12 signal
output options.
Applications- Semiconductor Etch
- Sputtering Chamber
- Load Lock Systems
- Process Control and Test
- Plasma Coating
